Journal: Biosensors
Article Title: Recent Progress in PDMS-Based Microfluidics Toward Integrated Organ-on-a-Chip Biosensors and Personalized Medicine
doi: 10.3390/bios15020076
Figure Lengend Snippet: The main steps of the photolithography technique for microfluidic device fabrication including cleaning the substrate wafer, depositing the photoresist on a silicon substrate, baking the wafer into the oven, aligning the photomask containing the pattern with the substrate, exposing the photoresist to UV, immersing the coated substrate in a solvent, rinsing the substrate with DI water, baking the wafer, depositing PDMS, and separating the polymer from the substrate and bonded with flat slide.
Article Snippet: The biomimetic microfluidic device was built using a matching design of PDMS channels sandwiched between two PMMA layers, as shown in a.
Techniques: Solvent, Polymer